FUNDAMENTALS OF SEMICONDUCTOR FABRICATION BY S.M.SZE PDF

MkroeinuU Pmcrwtnz Uthography ant! It contained one bipolar transistor, three resis- tors, ami one capacitor, all made in germanium and connected by wire bonding a hybrid semicodnuctor. For silicon, boron and phosphorus are the most common dopants for p- and n-type materials, respectively. Fundamentals of Semiconductor Fabrication — Gary S. May, S.

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Automatic Control Engineering Back cover copy This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits.

Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film deposition.

Process simulation is used as a tool for what-if analysis and discussion. Comprehensive coverage of process sequences helps readers connect individual steps into a cohesive whole.

Chapter 2. Crystal Growth. Chapter 3. Silicon Oxidation. Chapter 4. Chapter 5. Chapter 6. Chapter 7. Ion Implantation.

Chapter 8. Film Deposition. Chapter 9. Process Integration. Chapter IC Manufacturing. Future Trends and Challenges. Appendix A: List of Symbols. Appendix C: Unit Prefixes. Appendix D: Greek Alphabet. Appendix E: Physical Constants. Appendix K. Percentage Points of the t Distribution. May Gary S. May, Ph. Simon M. Sze, Ph. He has authored or coauthored over technical papers, and has written, edited, and contributed to 24 books.

His book Physics of Semiconductor Devices Wiley , 2nd Ed, is the most cited work in contemporary engineering and applied science publications over 12, citations from ISI Press.

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FUNDAMENTALS OF SEMICONDUCTOR FABRICATION BY S.M.SZE PDF

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